Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction

Abstract The article presents a redesigned sensor holder for an atomic force microscope (AFM) with adjustable probe direction, which is integrated into nano measuring machine (NMM-1). AFM, consisting of commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, based on two rotational axes, enable the adjustment direction to cover complete hemisphere. axes greatly enlarge metrology frame system by materials comparatively high coefficient thermal expansion. AFM therefore within thermostating housing long-term temperature stability 17 mK. holder, connecting and cantilever, inserted one adhesive bond, soldered connection geometrically undefined clamping circle, might also be source measurement error. It has been clamped senor presented, evaluated compared previous glued this paper. As will shown, there are no significant differences between holders. This leads conclusion, that three aforementioned connections do not deteriorate precision, significantly. only minor portion positioning range piezoelectric actuator needed stimulate near its resonance frequency, high-speed control keeps operating using further as was implemented presented article.